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  5. The Antistatic System for Ultrapure Water (MEGCON)

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The Antistatic System for Ultrapure Water (MEGCON)

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"MEGCON Ⅱ+" is the equipment that controls the resistivity value of ultrapure water
by dissolving carbon dioxide gas in ultrapure water through special hollow-fiber membrane.

Overview

In the precision cleaning of semiconductor products, ultrapure water is used that is almost free of ion component.
Therefore, static electricity can easily generate and the following errors cause product defect.

  • Destruction of substrate circuit (ESD damage)
  • Particle reattachment

With MEGCONⅡ+, by reducing the resistivity value of ultrapure water and giving it conductivity,
it is possible to prevent defects caused by this static electricity.

Applications

  • Dicing process
  • High Pressure jet cleaning
  • Scrubber cleaning
  • Liquid crystal process
  • Mask and reticle cleaning

Features

  1. Low risk of particle contamination and small amount of CO2 gas consumption
  2. Possible to control even in the case of small flow rate
  3. Low pressure loss
  4. Automatic control of resistivity value
  5. Line-up large flow rate models

Principle

Control the resistivity value of ultrapure water by dissolving carbon dioxide gas in ultrapure water through special hollow-fiber membrane.

Total systems for medical/pharmaceutical water

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