ZIRCONIA MICRO OXYGEN ANALYZER
Introduction
- Principle
- TF-21D201 using NGK thick film sensor technology is the sensor that uses the maximum capacity of zirconia concentration cell.
- Features
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- Extremely small sensor enabling measuring in % and 0-10ppm range.
- Foot space reduced by separating probe and receiver.
- Swedgelock fitting enables easy and positive sensor connection.
- Thick film sensor conforming to the specifications for vacuuming such as load locking.
- Four measuring ranges in % and 0-10ppm selectable.
- Range switching with local/remote/auto range selections.
- Free NC/NO upper and lower alarm setting.
- Extremely resistant to organic silicone with special treatment.
Applications
- TF-21D201:Semiconductor manufacturing facilities, diffusion furnaces, RTP, various N2 furnace environments measuring, air separators.
- TF30D201:Reflow, ferrite sintering ovens,various environment control, and combustion control.
( * ) The products of gas analysis category are manufactured and sold by Energy Support Corporation, NGK group company. Please inquire by the contact form.
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