ZIRCONIA MICRO OXYGEN ANALYZER

Introduction

Principle

TF-21D201 using NGK thick film sensor technology is the sensor that uses the maximum capacity of zirconia concentration cell.

Features

• Extremely small sensor enabling measuring in % and 0-10ppm range.
• Foot space reduced by separating probe and receiver.
• Swedgelock fitting enables easy and positive sensor connection.
• Thick film sensor conforming to the specifications for vacuuming such as load locking.
• Four measuring ranges in % and 0-10ppm selectable.
• Range switching with local/remote/auto range selections.
• Free NC/NO upper and lower alarm setting.
• Extremely resistant to organic silicone with special treatment.

Applications

• TF-21D201:Semiconductor manufacturing facilities, diffusion furnaces, RTP, various N₂ furnace environments measuring, air separators.
• TF30D201:Reflow, ferrite sintering ovens,various environment control, and combustion control.

( * ) The products of gas analysis category are manufactured and sold by Energy Support Corporation, NGK group company. Please inquire by the contact form.