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Hi-Performance Ceramics Business | Ceramic Component for Semiconductor Manufacturing

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The structures of ceramic components are very simple. Resistive heating element and Electrode are embedded in the core material of the heater, which is made of Aluminum nitride ceramics by sintering. The maximum temperature of the heater is 800 centigrade. The ceramic heaters and E-Chuck can provide a wide range of stable temperature and have the superior strength under the severe semiconductor manufacturing process.

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