The part of ceramic magnetic drive pump, which has direct contact with the liquid, is made of fine ceramics. This pump is superior in the resistance against corrosion, heat and slurry. During operation, the maximum temperature is 140 centigrade and the maximum pressure is 1.1MPa. The part of ceramic vacuum pump which is in direct contact with the gas is also made of ceramics; therefore corrosion gas can be directly absorbed.
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